Research advances of electrochemical micro/nanofabrication based on confined etchant layer technique

与机械加工相比, 电化学加工技术具有无刀具磨损、无热效应、无机械损伤、加工效率高等优点, 而且适用于柔性、脆性及超硬材料,; 具备传统方法难以实现的复杂结构加工能力, 因而在航空航天、汽车、微电子等领域有着重要应用, 日益成为一种重要的工业制造技术.; 随着超大规模集成电路(ULSI)、微机电系统(MEMS)、微全分析系统(mu-TAS)、现代精密光学系统等高技术产业的迅速发展,; 功能性结构/器件的微型化和集成化的要求越来越高. 由于传统电化学只适用于金属材料, 为了应对微纳制造的时代要求, 拓展电化学加工的材料普适性,; 1992年田昭武院士提出了具有我国自主知识产权的约束刻蚀剂层技术(CELT). 一般的, 约束刻蚀包括3个步骤:; (1)通过电化学、光化学或光电化学的方法在模板电极表面生成刻蚀剂;; (2)通过后续的均相化学反应或自由基衰变反应将刻蚀剂约束在微/纳米厚度的液层内; (3)将模板电极逼近加工基底,; 当约束刻蚀剂层接触被加工基底时, 通过刻蚀反应实现微纳加工. 最近, 联合课题组通过仪器、原理和方法3个方面的努力, 引入外部物理场调制技术,; 实现一维铣削、二维抛光、三维微/纳结构加工, 大幅提升了CELT的技术水平.Compared with mechanical machining, ECM has several advantages, such as; avoiding tool wear, none thermal or mechanical stress on machining; surfaces, as well as high removal rate. Moreover, ECM is capable of; making complex three-dimensional structures and is appropriate for; flexible, fragile, or fissile materials even materials harder than the; machining tool. Thus, ECM has been widely used for various industrial; applications in the fields of aerospace, automobiles, electronics, etc.; ECM methods can be classified usually as electrolytic machining based on; anodic dissolution and electroforming based on cathodic deposition of; metallic materials. Recently, high technology industry, such as; ultralarge scale integration (ULSI) circuits, microelectromechanical; systems (MEMS), miniaturized total analysis systems (mu-TAS) and; precision optics, has developed more and more rapidly, where; miniaturization and integration of functional components are becoming; significant. Nowadays, the feature size of interconnectors in ULSI; circuits has been down to 20 nanometers, predicted by Moore's law.; Confined etchant layer technique (CELT) was proposed in 1992 to; fabricate three-dimensional micro- and nanostructures (3D-MNS) on; different metals and semiconductors, which has been developed an; effective machining method with independent intellectual property; rights. Generally, there are three procedures in CELT: (1) generating; the etchant on the surface of the tool electrode by electrochemical or; photoelectrochemical reactions; (2) confining the etchant in a depleted; layer with a thickness of micro- or nanometer scale; (3) etching process; when the tool electrode is fed to the workpiece, which applicable for 1D; milling, 2D polishing, and 3D microfabrication with an accuracy at micro; or nanometer scale. External physical-field modulations have recently; been introduced into CELT to improve its machining precision. In this; review, the advances of CELT in principles, instruments and applications; will be addressed as well as the prospects.国家自然科学基金; 机械制造系统工程国家重点实验室开放课题资助项

A Study on Runoff Characteristics and Sediment Yield of Urbanized Watershed

有鑑於都會四周各山坡地都巿化現象日趨嚴重 ,所衍生對下游之衝擊亦更加惡化,本研究擬以台 北(南港,文山地區),台中(大坑地區),高雄(新化地 區)等試驗集水區之雨量,流量,泥砂產量等相關之 實際水文資料,求得各場暴雨之洪�到達時間,稽 延時間,單位面積泥砂產量等因子,並擬找出各因 子間及其與地形因子間之相關性,並與以往已有 水文(水理)公式相較,以驗證或修正適用於都巿化 山坡地之水文模式

A Study on the Relationship between the Formation of Debris Flow and River Bed Equilibrium (III)

土石流係由各種不同粒徑之顆粒與水之混 合物,因重力作用所產生之流動體,其顆粒有大 至數公尺之巨石,小至0.01公厘以下之顆粒,由於 其濃度甚高,對河床之沖蝕能力相當強勁,對於 下游地區氾濫所造成之破壞,可使整個社區家 破人亡,其社會損失甚為重大.本研究計畫將就 台灣中部板岩地區,繼續蒐集土石流發生地區 之水文、地形、地質、土地利用、河道調查等 之現地資料,並對相關之災害文獻一併予以蒐 集及整理;期能獲得土石流所產生之大量泥砂 在上游泥砂生產模式中所扮演之角色.其次,針 對第一期計畫所選定-陳有蘭溪主流-之野外試 驗地中大量土石生產堆積於河床後之河道沖淤 變化情形繼續進行土石生產量及河床沖淤量之 相關性分析,以建立土石下移量與河道之河床 變動之關係模式,另以日本京都大學防災研究 所江頭(S. Egashira)及蘆田(K. Ashida)教授最近所發 展適用於土石流及河床載之統一性輸砂理論予以檢討(Unified view of the mechanics of debris flow and bed load).此外,並於試驗渠槽中進行土石淤積形 態對輸送過程有關之各項模型試驗,進而整合 水理資料與現場調查及渠槽試驗結果,完成土 石堆積河槽後對河道平衡之相關性探討,並驗 證土石下移量與河床變動模式在野外估測之可 行性.本研究計畫完成後,應用土石流在平衡河 道中之機制特性,將可對未來集水區治理時可 能產生之土石流災害,採取可行之防災對策,對 於集水區生產之泥砂運移予以妥善控制,則除 可減少或避免泥砂災害之發生外,尚可充分利 用砂石資源,供作各項建設之用