Investigation for Metal Lift-off Process in RF MEMS Switch

研究用bP212正性光刻胶(浸泡氯苯)、AzP4620正性光刻胶(浸泡氯苯)、Az5214E反转光刻胶光刻后的图形剥离金属的难易度及图形质量.用扫描电镜(SEM)观察不同光刻胶及浸泡氯苯后的侧壁图形,并分析不同侧壁图形的形成机理,找出最佳工艺参数,并应用于射频MEMS开关制作中的金属剥离.The lift-off processes of BP212 positive photoresist(and chlorobenzene treatment) and AZP4620 positive photoresist(and chlorobenzene treatment) were studied.AZ5214E image-reversal photoresist was also studied.Side wall graphics were observed using scanning electron microscope(SEM).The forming mechanism of different lateral wall pattern was analysed.The optimum process parameters were found and used in metal lift-off in RF MEMS switches.国家青年基金资助项目(60301006);福建省自然科学基金资助项目(A0310012

The Study on Mechanical Properties of Thin Film in Micro-electromechanical Systems

主要介绍微机电系统(MEMS)中几种测量薄膜力学性能的方法,如纳米压入法、单轴拉伸法、基底弯曲法、微旋转结构法,比较了各种方法的优缺点。这对MEMS器件的设计与研究具有重要意义。Some methods of measuring mechanical properties of thin film in Micro-electromechanical systems are intro-duced including nanoindentation,single axial tension,wafer curvature,micro rotating structure,etc.Their advantages and disadvantages are compared.It is useful for the design and researchment of MEMS devices.国家基金青年基金(60301006);; 福建省自然科学基金(A0310012);; 国家留学基金项目资

Development of Electrochemical Biosensor for Detection of PML/RARα Fusion Gene in Acute Promyelocytic Leukemia

针对急性早幼粒细胞白血病(APl)中PMl/rArα融合基因的碱基序列,设计了锁核酸(lnA)修饰的发夹结构捕获探针,结合信号探针构建新型的“三明治“电化学传感模式。信号探针末端修饰的生物素可与酶上的亲和素结合,通过检测酶催化H2O2氧化底物3,3',5,5'-四甲基联苯胺(TMb)产生的电化学信号,实现对靶序列的检测。该传感器可识别和定量检测PbS缓冲液中人工合成的PMl/rArα融合基因序列。结果表明,该传感器能很好地区分互补序列、单碱基及多碱基错配序列,杂交电流值与目标链浓度在1.0x10-11~1.6x10-10 MOl/l范围内呈较好的线性关系,检出限为1.0x10-13 MOl/l。同时,该新型传感器成功地用于无稀释人血清中PMl/rArα融合基因的检测,具有特异性强、灵敏度高和重复性好的优点,有望用于临床实际样品的检测,进而实现临床上急性早幼粒细胞白血病的早期诊断及预后判断。A novel DNA electrochemical probe(locked nucleic acid,LNA) was designed and involved in constructing an electrochemical DNA biosensor for the detection of PML/RARα fusion gene in acute promyelocytic leukemia(APL).This biosensor was based on a "sandwich" detection strategy,which involved a pair of LNA probes,e.g.hairpin capture probe and reporter probe.Streptavidin-HRP was bound to biotin labeled at the end of reporter probe via streptavidin-biotin affinity binding.In the presence of hydrogen peroxide(H2O2),HRP catalyzed the oxidation of the substrate 3,3′,5,5′-tetramethylbenzidene(TMB) to offer an enzymatically amplified electrochemical current signal for the detection of target DNA.This sensor was applied in the direct quantitative detection of synthetic PML/RARα fusion gene in PBS buffer.The results indicated that the biosensor showed an excellent specificity to distinguish the complementary sequence and different mismatch sequences.A linear relationship between the amperometric signal and the target concentration was obtained in the range of 1.0×10-11-1.6×10-10 mol/L with a detection limit of 1.0×10-13 mol/L.In addition,the biosensor was used for the determination of PML/RARα fusion gene in human serum samples without dilution with high sensitivity,selectivity and good repeatability.This method would be expected to use in real sample for further solving the actural problems of early diagnosis and prognosis monitoring of APL.863计划资助项目(2008AA02Z433);福建省高校产学研科技重点项目(2010Y4003);国家自然科学基金资助项目(20805006;20975021);福建省自然科学基金资助项目(2010J05019

小槐花的化学成分研究

目的:系统研究中药小槐花中的化学成分。方法:利用大孔树脂,Sephadex LH-20,ODS及正相硅胶柱等色谱手段进行分离,通过多种波谱学数据分析进行化合物的结构鉴定。结果:从小槐花60%乙醇提取物中分离得到15个化合物,经结构鉴定分别为豆甾醇(1),β-谷甾醇(2),柠檬酚(3),黄槿酮A(4),异柠檬酚(5),kenusanone I(6),neophellamuretin(7),清酒缸酚(8),古柯三醇(9),黄槿酮D(10),山柰酚(11),8-prenylquercetin(12),leachianone G(13),5,7,4'-三羟基-二氢黄酮醇(14),4H-1-benzopyran-4-one,2-(3,4-dihydroxyphenyl)-2,3-dihydro-3,5,7-trihydroxy-8-(3-methyl-2-butenyl)-,(2R-trans)-(9CI)(15)。结论:除化合物8外,所有化合物均为从该种植物中首次分离得到

Y型聚乙二醇干扰素琢-2b注射液治疗HCV基因2/3型慢性丙型肝炎患者疗效和安全性的多中心随机对照试验研究

目的以标准剂量的聚乙二醇干扰素(Peg IFN)α-2a联合利巴韦林作为阳性对照,评价新型试验药物Y型Peg IFNα-2b注射液联合利巴韦林治疗2型/3型慢性丙型肝炎(CHC)患者的疗效和安全性。方法采用多中心、随机开放、阳性药对照的Ⅲ期临床试验,筛选符合要求的2型/3型CHC患者,按照2:1的比例随机分配到Y型Peg IFNα-2b组和Peg IFNα-2a组,同时口服利巴韦林,疗程24 w,停药随访24 w。采用Abbott Real Time HCV Genotype II检测HCV基因型,采用Cobas Taq Man实时定量PCR法检测血清HCV RNA水平。详细记录不良事件。主要疗效指标为持续病毒学应答(SVR),并进行非劣效检验。结果本试验实际入组2型/3型CHC患者255例,实际治疗241例。全分析集(FAS)数据显示,158例试验组和83例对照组患者SVR分别为85.4%(95%CI 79.94%~90.94%)和79.5%(95%CI 70.84%~88.20%,P=0.2402);对符合方案分析集(PPS)人群分析显示,试验组和对照组患者SVR分别为87.9%(95%CI 82.45%~93.27%)和85.9%(95%CI 77.82%~94.01%,P=0.7060),率差的95%可置信区间均符合非劣效标准;对PPS人群分析显示,85.8%受试者获得了早期病毒学应答(RVR),RVR的阳性预测值为90.1%;试验组和对照组不良事件发生率相似,分别为95.6%和95.2%,严重不良事件发生率分别为3.8%和3.6%。结论应用Peg IFNα联合利巴韦林治疗2型/3型CHC患者,新型试验药物Y型Peg IFNα-2b具有与对照药物Peg IFNα-2a相似的疗效和安全性。国家科技部“十二五”重大专项(编号:2012ZX10002-003)；“重大新药创制”十二五科技重大专项(编号:2012ZX09303019)

浅淡中职中青年班主任培养

对学生而言，班主任对其有很大的影响。因为处于中职时期的学生，大都还缺乏一定的辨别能力和自立能力，而班主任又是其成长的重要影响源，因为班主任的素质、魅力、言行举止等，都很容易直接影响到学生，甚至很可能对其一生产生影响。从而为了学生更好的发展，本文对“新时期中职班主任素质的培养”进行了深入探究。旨在培养好每一个中职青年班主任，让他们懂得如何利用更科学有效地方法开展班主任工作，对班级进行更合理的管理。</jats:p

电导纳容积法对先天性心脏病心功能的观察

【目的】了解右胸电导纳容积图(RCEAP)检测左向右分流先天性心脏病(先心病)体外循环手术前后小循环心功 能指标变化情况。【方法】应用 RCEAP 观察左向右分流先心病小循环心功能指标。【结果】体外循环手术前后观察表明, 术 后早期 Q-j 与 j-z 间期均缩短, 以 j-z 间期缩短为主,致 Q-j/j-z 比值升高,而术后 7～ 10 d, j-z 间期稍回升, Q-j 稍下降, 致 Q-j/j-z 比值下降。主波幅( hZ)与次波幅( hC)之间的比值 hC/hZ 与 PCWP 呈显著相关(r =0. 7947, P <0. 01)。【结论】RCEAP 有 无创、操作简便、费用低廉、可重复检测等优点, 在左向右分流先心病中的应用有较大的应用价值和较好的使用前景

Study the performance of AZ5214E image-reversal photoresist and its uses in lift-off technics

研究了AZ5214E反转光刻胶的性能并选择适当的工艺可制得利于剥离的倒台面,并将其应用于射频MEMS开关的制作中剥离厚 2μm的金薄膜。用扫描电镜(SEM)测出胶的侧壁为倒台面。The performance of AZ5214E image-reversal photoresist was studied and achieves negative sidewalls when choosing proper processes. They are good for lift-off technics. It could be used to lift off 2μm Au for the facture of RF MEMS switch. The negative sidewalls can be observed with SEM.国家基金青年基金资助项目(60301006);; 福建省自然科学基金资助项目(A0310012

The study on technology for the silicon nitride thin films by PECVD

采用了等离子体增强化学气相沉积法(plas-ma-enhanced chemical vapor deposition,PECVD)在聚酰亚胺(polyimide,PI)牺牲层上生长氮化硅薄膜,讨论沉积温度、射频功率、反应气体流量比等工艺参数对氮化硅薄膜的生长速率、氮硅比、残余应力等性能的影响,得到适合制作接触式射频MEMS开关中悬梁的氮化硅薄膜的最佳工艺条件。The silicon nitride thin films are deposited on polyimide sacrificial layer by PECVD.The influence of the process parameters such as temperature,power,the ratio flux of reactant on the residual stress and other characteristics of silicon nitride thin films are discussed.The optimum process condition is obtained,and the silicon nitride thin films deposited by the process condition have been successfully applied in RF MEMS switch.国家基金青年基金资助项目(60301006);; 福建省自然科学基金资助项目(A0310012

Study on RF MEMS Switch

概述射频MEMS开关的研究背景及意义,介绍国内外射频MEMS开关的研究现状,列举出两种主要的射频MEMS开关:电容耦合并联式开关和金属-金属接触串联式开关的结构、工作原理、性能比较。Background and significance of studying on RF MEMS switch are overviewed.Status of studying on RF MEMS switch at home and abroad is introduced.Two kinds of RF MEMS switches are listed.Structure and principle of RF MEMS switch in series and capacitive coupling are compared.国家基金青年基金(项目编号：60301006);; 福建省自然科学基金(项目编号：A0310012