Capacitive Pressure Microsensor

文中主要介绍一种新型电容式测压微传感器的结构及测量电路。通过对测量电路的理论分析、仿真和实验验证,证明这种微型传感器由于采用独特的结构和测量电路,因而具有良好的线性范围和较高的灵敏度,并能有效地减小温度误差This paper introduce the structure and measuring circuit of a new type of capacitive pressure microsensor . Through theoretic analysis,simulations and experiments,it has been proved that this type of microsensor has excellent linearity,ralatively high sensivity and can compensate the temperature error effectively

A Novel Capacitive Pressure Microsensor

文中从应用开发MEMS产品的实用角度出发 ,着力介绍一种新型的电容式微型压力传感器的结构组成和它的MEMS制造工艺。文中详细给出了这种电容式微型压力传感器的结构组成图、组成尺寸和它各部分部件的材料构成以及在硅材料加工过程中存在的主要技术难题。最后 ,详细给出了电容式微型压力传感器的加工工艺过程This paper introduces the producing technology of the capacitive pressure microsensor and MEMS structure of the capacitive microsensor.The information about composite diagram and dimension and material are given in the paper.In order to solve the special technics problem in producing microsensor,the diagrams for the producing technology are given in detail

Characteristic Analysis of Capacitive Pressure Microsensor

本文主要对电容式测压微传感器的力学特性和电学特性进行分析。文中通过对测量电路工作过程和特性的深入探讨、仿真和验证 ,证明这种传感器的测量电路具有良好的线性度和稳定性。通过对传感器的敏感元件硅膜片的力学分析 ,建立了传感器的力学模型。分析的结果表明 :传感器敏感元件和电容器的物理特性是影响传感器输出响应线性的主要因素The mechanics and electrics characteristics of a type of capacitive microsensors are introduced here.It has been proved that the measurement circuit has excellent linearity and stability through the deep discussion, simulation and experimentof the characteristic and the operation procedure of the circuit.Through the mechanics analysis of the sensitive component—— silicon membrane,its mechanics model has been established.the analysis has proved that the physical characteristics of the sensitive component and the capacitance are the main factors that influence linearity of the output response of the sensor

Null Point and Gain Adjustable Capacitive Microsensor

文中介绍一种可调零点和增益的电容式微型传感器。通过对MOS电流镜电路的深入探讨 ,给出了由MOS电流镜电路组成的零点和增益可调的电容式微型传感器测量电路 ;通过对传感器测量电路的动态过程仿真 ,明确了测量电路的最佳工作频率范围 ;通过对传感器测量电路静态过程的仿真 ,确定了这种测量电路的线性度和增益。由以上研究表明 ,零点和增益可调的电容式微型传感器具有线性度好和测量增益高的特点 ,并能有效地消除电路中的寄生电容对测量的影响 ,大大降低测量噪声。A type of capacitive microsensor whose null point and gain can be regulated is introduced here. The paper presents the measurement circuit of this microsensor through the application of the MOS current mirror circuit. It can clarifies the best working frequency range of the measurement circuit through the simulation of the dynamic and process of the circuit and get its linearity and gain through the simulation of the process of the circuit. Above researches have proved that such type of microsensor has good linearity and high gain and it can eliminate the influence of the stray capacitance on measurement, moreover it can decrease the noise of measurement

MOS field effect transistor pressure microsensor

阐述了一种MOS场效应管 (MOSFET)压力微传感器的结构和基本工作原理。通过对该传感器的仿真实验 ,证明了MOSFET压力微传感器可通过简单的电压———电流转换原理 ,利用栅极电容的变化导致漏极电流与开启电压的变化而有效地测出作用于栅极膜片的压力的变化 ,具有较高的灵敏度与稳定性。The structure and basic working principle of a type of MOS field effect transistor pressure microsensor are presented. On the basis of simulation experiment, it proves that this microsensor can make use of the change of gate capacitance which leads to the change of drain current and threshold voltage to measure the change of pressure on the gate diaphragm effectively.This type of microsensor possesses higher sensitivity and higher stability

荧光分光光度计的研制

本文介绍的荧光分光光度计,其工作波长范围为360—650毫微米,波长准确度为360—600±1毫微米,半波宽度580毫微米处为8毫微米,最灵敏挡的灵敏度可检测0.05 ppb的荧光素钠溶液,高压电源稳定度优于0.1％,测试精度约为±1.5％。荧光分析法具有如下特点:(1) 灵敏度高,可检测出含量低至0.05 ppb的强荧光性物质;(2) 测量的线性范围宽,其上下限浓度差别达一千倍左右;(3) 取样量少,一般取样量是几微升至几毫升;(4) 测定速度快,每个样品的测定仅需几分钟。荧光分析已广泛应用于工业、农业、冶金、生化、医药等部门。它在环保中的应用也相当广泛,例如:强致

ZnSe/MoO3/TiO2复合膜的制备及其光生阴极保护效应

针对TiO2半导体不能有效吸收可见光,光电转换效率较低等问题,可通过对TiO2半导体进行修饰和改性,制备TiO2复合材料,提高其光电化学性能。因此,本工作以Ti表面制备的TiO2纳米管膜为基础,分别应用循环伏安电沉积法和脉冲电沉积法在膜表面先后沉积MoO3和ZnSe颗粒,获得具有级联能带结构的ZnSe/MoO3/TiO2纳米管复合膜,并将其应用于对403不锈钢（403SS）实施光生阴极保护。相较于纯TiO2纳米管膜,紫外-可见（UV-Vis）吸收光谱和光致发光（PL）谱测试表明,ZnSe/MoO3/TiO2复合膜的吸收边红移,在可见光区具有良好的光吸收性能,光生载流子复合得到更有效抑制。光电化学测试表明,白光照射下,处于0.5 mol·L-1 KOH溶液中的ZnSe/MoO3/TiO2复合膜的光电流密度达到了同条件下纯TiO2膜的2倍,可使与之耦连的浸泡于0.5 mol·L-1 NaCl溶液中的403SS电极电位下降470 mV,显示出良好的光生阴极保护效应。复合膜还具有一定的储能特性,在光照后又转为暗态的22.5 h内仍对403SS具有一定阴极保护作用。国家自然科学基金(21573182,51731008,51671163,21621091,J1310024)资助项目~