Development of the ESBM (Extended Sacrificial Bulk Micromachining) technology and its application to the fabrication of inertial sensor

학위논문(박사)--서울대학교 대학원 :전기·컴퓨터공학부,2003.Docto

자동차에어백용 정전용량형 미소가속도계에 관한 연구

학위논문(석사) - 한국과학기술원 : 기계공학과, 1997.2, [ viii, 79 p. ]The thesis presents the analysis, design, fabrication, testing and uncertainty evaluation of a surface-micromachined capacitive accelerometer, where grid-type electrodes are surrounded by a perforated proof-mass, suspended by cantilever beam springs. From an electromechanical analysis of the accelerometer, analytic design formulae for mass, stiffness, frequency, amplitude and sensitivity have been developed. In the design process, the sizes of the accelerometer are decided to satisfy the performance requirements for an automotive airbag application as well as the size constraints from the microfabrication process. From a 4-mask surface-micromachining process, the designed accelerometers have been fabricated with on-chip test structures for residual stress, Young``s modulus and micromachining accuracy, from which the maximum residual stress of 1.5MPa, the Young``s modulus of 94.0±1.0GPa and the minimum micromachining errors of ±0.4 ㎛ are measured, respectively. From the test of the fabricated accelerometer, the natural frequency of 5.8±0.17kHz and the sensitivity of 0.28mV/g have been measured and compared well with the estimated values of 5.7±0.3kHz and 0.29±0.1mV/g, respectively. The parasitic capacitance of the detection circuitry has been measured as 3.34±1.16pF. From the uncertainty analysis of the present accelerometer, we find that the uncertainty in the beam-width becomes the major source of the uncertainty in the natural frequency estimation, while the uncertainties in parasitic capacitance, inter-electrode gap and resonant frequency influence the sensitivity uncertainty in the portions of 75%, 14% and 11%, respectively.한국과학기술원 : 기계공학과

ANALOG TO DIGITAL CONVERTER AND ANALOG TO DIGITAL CONVERTING METHOD WITH SKIPPING RESET

일 실시예에 따른 아날로그 디지털 변환기가 제공된다. 아날로그 디지털 변환기는 리셋 동작을 스킵하고, 제2 비트 그룹에 대응하는 커패시터 셀의 이전 사이클에서의 연결을 유지하면서, 제1 비트 그룹에 대응하는 커패시터 셀의 연결을 조정하여 아날로그 신호에 대응하는 디지털 신호를 출력할 수 있다

The vapor-phase catalytic hydrogenation of nitrobenzene to aniline

학위논문(석사) - 한국과학기술원 : 화학공학과, 1982.2, [ [viii], 103 p. ]한국과학기술원 : 화학공학과