2 research outputs found

    The effects of deposition variables on deposition rate in chemical vapor deposition of Si3N4Si_3N_4 onto silicon single crystal

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    학위논문(석사) - 한국과학기술원 : 재료공학과, 1984.2, [ iii, 60 p. ]한국과학기술원 : 재료공학과
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