원자로용기에 대한 탄-점소성 변형의 무차원 모델링 연구

Thesis (doctoral)--서울대학교 대학원 :원자핵공학과,2001.Docto

TMI-2 원자 로 압력용기 하부 온도변화 추이 해석을 위한 반구형 틈에서의 열전달 실험

Thesis (master`s)--서울대학교 대학원 :원자핵공학과,1996.Maste

讓渡差益算定에 있어서 基準時價課稅原則에 관한 硏究

학위논문(석사)--서울대학교 :법학과 세법 전공,1999.Maste

절편 폴리우레탄과 실리콘을 지닌 폴리우레탄의 합성과 성질에 관한 연구

학위논문(석사) - 한국과학기술원 : 화학과, 1985.2, [ [iii], 44 p. ]The segmented polyurethanes were synthesized by the reaction of polypropylene glycols having a different molecular weight and OH-terminated dimethylsiloxane with 4,4``-diphenyl methane diisocyanate (MDI) and N-methyl diethanolamine (MDEA) as a chain extender. Diphenyl bis(4-isocyanatophenyl)silane as organosilicon diisocyanate was synthesized from corresponding diacid via Wienstock-Curtius modified rearrangement of diacidazide in benzene. This diisocyanate was reacted with N-methyl diethanolamine by the condensation polymerization to improve thermal resistance. The structures of organosilicon diisocyanate and all resulting polymers in this study were identified by IR and $^1$H-NMR spectroscopy. The obtained polyurethanes had inherent viscosity in the range of 0.25-0.36 dl/g. The thermal stability of the polyurethanes was evaluted by TGA and Tg of the polymers was determined by using DSC. It was turned out that the incorporation of silicon atom increased their thermal stabilities and that the increasing molecular weight of polypropylene glycol as a soft segment decreased glass transition temperature.한국과학기술원 : 화학과

A study on the Fabrication and Characterization of Alumina Electrostatic Chuck for Silicon Wafer processing

정전척의 유전체 물질로 열전도도와 유전특성 그리고 기계적 특성이 우수한 알루미나에 TiO₂첨가하여 유전체의 비저항을 변화시켜서 정전척(electrostatic chuck)에서 발생하는 정전력인 쿨롱힘(coulomb force)과 존슨-라벡힘(Johnsen-Fahbeck firce_의 영향을 규명하려 하였다. 그리고 비저항, 인가전압, 온도, 습도가 정전력에 어떠한 영향을 주는지 고찰하였으며, 인가전압에 따른 응답 특성에 관하여 고찰하였다.Alumina electrostatic chucks for silicon wafer process with wide range of electrical resistivity were fabricated by controlling the amount of TiO₂ addition (0 wt%, 1.3 wt%, 2 wt%, 2.8 wt%). The dependence of electrostatic force on applied voltage, temperature and humidity was investigated. In addition, response characteristics on applied voltage and relationship between electrical resistivity and electrostatic force characteristics such as Coulomb force and Johnsen-Rahbeck force were discussedAlumina electrostatic chucks for silicon wafer process with wide range of electrical resistivity were fabricated by controlling the amount of TiO₂ addition (0 wt%, 1.3 wt%, 2 wt%, 2.8 wt%). The dependence of electrostatic force on applied voltage, temperature and humidity was investigated. In addition, response characteristics on applied voltage and relationship between electrical resistivity and electrostatic force characteristics such as Coulomb force and Johnsen-Rahbeck force were discusse