Effect of ions and radicals on formation of silicon nitride gate dielectric films using plasma chemical vapor deposition

We have clarified effects of ions and radicals on the film property of ultrathin silicon nitride (SiN_x) films of 5 nm in thickness formed on Si substrates at 300 ℃ in electron cyclotron resonance plasma-enhanced chemical vapor deposition (PECVD) employing ammonia and silane (NH_3/SiH_4), and nitrogen and silane (N_2/SiH_4) gases. In situ Fourier transform infrared reflection absorption spectroscopy and in situ x-ray photoelectron spectroscopy confirmed that in N_2/SiH_4 plasma, Si-N bonds in the film were increased by eliminating charged species, and thus, radicals promoted the formation of the SiN_x film of high Si-N bond density. On the other hand, Si-N bonds in the film were decreased by eliminating charged species, and eventually, ions played an important role in forming the film of high Si-N bond density in NH_3/SiH_4 plasma. The excellent hysteresis of 0.04 V was successfully achieved with the NH_3/SiH_4 plasma. Furthermore, the quadrupole mass spectroscopy suggests that {NH_4}^+ charged species make a significant contribution to the formation of ultrathin SiN_x films with high quality. These results provide insights into important species to be controlled in the PECVD for low temperature formation of the SiN_x gate dielectric films in ultralarge scale integrated circuits.journal articl

Improved measurement of CP-violation parameters sin⁡2ϕ1 and |λ|, B meson lifetimes, and B0-B̅0 mixing parameter Δmd

journal articl

Estimating Depth of Layered Structure Based on Multispectral Speckle Correlation

Some objects have layered structures in which a dynamic region is covered by a static layer. In this paper, we propose a new experiment for estimating the depth of the dynamic region using speckle analysis. The speckle is caused by the mutual interference of a coherence laser. We use two characteristics of the speckle. One is the temporal stability of the speckle pattern and the other is the wavelength dependency of the transmittance of the laser. We estimate the depth by computing correlations of speckle patterns using multispectral lasers. Experimental results using a simulated skin show that multispectral speckle correlation can be used for analyzing a layered structure.conference pape

Subrogation on to Security

論説application/pdfdepartmental bulletin pape

Is splash lubrication compatible with efficient gear units for high-speed applications?

International audienc

Comparison of extraction sign information by virtual 3D space image and notation

The modern city space is complicated, and the elements constituting space are various. And we obtain information necessary to decide a position and a course from many elements. The signature is very important as a method of the reporting, but the optimization of the signature is not done under the present conditions. Therefore we compared extraction sign information to be provided from notation with virtual 3D space image to optimize a sign.departmental bulletin pape

Johannis Buxtorfi P. Tiberias, siue Commentarius Masorethicus triplex historicus, didacticus, criticus : ad illustrationem operis Biblici Basiliensis conscriptus, quo primùm historia Masoretharum Tiberiensium ... secundò Clavis Masorae traditur ... Tertiò castigationes innumerorum mendorum per universam Masoram proponuntur /

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