Surface reaction of CF_2 radicals for fluorocarbon film formation in SiO_2/Si selective etching process

The surface reaction of CF_2 radicals on Si and fluorocarbon films was investigated in electron cyclotron resonance (ECR) Ar and H_2 /Ar downstream plasmas employing CF_2 radical injection technique. The effects of Ar^+ ions, Ar^* metastable species and radiation from plasmas on the fluorocarbon film formation were evaluated in ECR Ar downstream plasma with CF_2 radical injection. As a result, CF_2 radicals with assistance of Ar+^ ion bombardment were found to play an important role in the fluorocarbon film formation. The adsorptive reactions of CF_2 radicals on the fluorocarbon film surface with and without Ar and H_2 /Ar plasma exposures were successfully investigated by in situ Fourier transform infrared reflection absorption spectroscopy and in situ x-ray photoelectron spectroscopy. It was found that the formation of fluorocarbon film in the plasma proceeded through the adsorptive reaction of CF_2 radicals at a high probability on the active sites formed by the bombardment of Ar^+ ions on the fluorocarbon film surface.journal articl

The change of the samurai's premises in Moto–Osensui–machi, Tennou–cyo and Hachiken–cyo –A study on the samurai's premise of the Fukui castle town, part15–

This paper considers the change of the samurai's premises in Moto-Osensui-machi, Tennou-cyo and Hachiken-cyo referring to the `FUKUI JOUKA-EZU'. The allotment of the premises in Moto-Osensui-machi, one part of northeastern corner changed with Sotozyukusho setting Ansei 4 years. As for premises substitute had changed four times greatly, they were the time of change shift of feudal lord in the Kanei era first year, just after a big fire of Kanbun 9, the time of merger of the Matsuoka clan of Kyoho 6, and the time of setting of the Sotozyukusyo of Ansei 4. The allotment of the premises in Tennou-cho changed greatly during Manji 2 years from Keicho 18 years, but it is not strange afterwards. The other, and the premises substitute was performed frequently through the Edo era. On Hachiken-cho 8 pitu that were allotted to the premises in the big fire of Manji 2 had been the same until the late Edo period. The premises substitute between samurai's was repeated, but the shrines, the temples and the government office had not been established through the Edo era.departmental bulletin pape

第28号

一般雑誌記事 / Articlearticl

Improved measurement of CP-violation parameters sin⁡2ϕ1 and |λ|, B meson lifetimes, and B0-B̅0 mixing parameter Δmd

journal articl

Raindrop Detection and Removal from Long Range Trajectories

In rainy scenes, visibility can be degraded by raindrops which have adhered to the windscreen or camera lens. In order to resolve this degradation, we propose a method that automatically detects and removes adherent raindrops. The idea is to use long range trajectories to discover the motion and appearance features of raindrops locally along the trajectories. These motion and appearance features are obtained through our analysis of the trajectory behavior when encountering raindrops. These features are then transformed into a labeling problem, which the cost function can be optimized efficiently. Having detected raindrops, the removal is achieved by utilizing patches indicated, enabling the motion consistency to be preserved. Our trajectory based video completion method not only removes the raindrops but also complete the motion field, which benefits motion estimation algorithms to possibly work in rainy scenes. Experimental results on real videos show the effectiveness of the proposed method.conference pape

100-Year History of the Toyo Bunko

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