Cu配線材の電気化学的ポリシングの基礎的研究

Cu/Low-kデュアルダマシン配線形成プロセスにおけるCu配線膜ポリシングにおいて、超低圧ポリシング条件で高い加工能率を得ることを目的とした新しい電気化学的ポリシング方法を検討した。本方法は導電性表層と絶縁層を有する多層構造の電解セルパッドをプラテン・ローター型ポリシング装置に適用したもので、電解液に硫酸銅水溶液を使用し、定電圧電解によるCu配線膜の加工特性を測定した。0.1psi以下の加工圧力で800mm/min以上の加工レートが得られ、また、高い面内均一性が得られる可能性を報告する。textapplication/pdfdepartmental bulletin pape

Observation of B̅0→DsJ*(2317)+K- Decay

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Solar neutrino measurements in Super-Kamiokande-II

The results of the second phase of the Super-Kamiokande solar neutrino measurement are presented and compared to the first phase. The solar neutrino flux spectrum and time variation as well as oscillation results are statistically consistent with the first phase and do not show spectral distortion. The timedependent flux measurement of the combined first and second phases coincides with the full period of solar cycle 23 and shows no correlation with solar activity. The measured 8B total flux is (2:38± 0.05(stat.)/begin+0.16 // -0.15/end (sys.)) × 10^6 cm^{-2} s^{-1} and the day-night difference is found to be (-6.3 ±4.2(stat.)±3.7(sys.))%.There is no evidence of systematic tendencies between the first and second phases.journal articl

Blockage of growth factor receptor signaling pathways to overcome tamoxifen resistance

<p><b>Copyright information:</b></p><p>Taken from "Endocrinology and hormone therapy in breast cancer: New insight into estrogen receptor-α function and its implication for endocrine therapy resistance in breast cancer"</p><p>Breast Cancer Research 2005;7(5):205-211.</p><p>Published online 20 Jul 2005</p><p>PMCID:PMC1242145.</p><p>Copyright © 2005 BioMed Central Ltd</p> Tamoxifen (T) bound estrogen receptor (ER)-α in the membrane can activate epidermal growth factor receptor (EGFR), setting up a signaling cascade that leads to tamoxifen resistance. Blocking EGFR activation would block activation of mitogen-activated protein kinase (MAPK), AKT, ER-α and amplified in breast cancer (AIB)1, and would restore tamoxifen's antagonist activity on tumor growth

Nearly Pure Blue Photoluminescent Poly(2,7-[9-)3,5-bis[3,5-bis(benzyloxy)-benzyloxy]benzyl)-9-(3,6-dioxaoctyl)]fluorene) in Film

The first unsymmetrically substituted polyfluorene bearing a bulky poly(benzyl ether) dendron and less bulky 3,6-dioxaoctyl groups in the 9-position was designed and synthesized, which gives almost a pure bluish photoluminescence with negligible weak greenish excimer emission around 520 nm even in a thermally annealed thin solid film.journal articl

箕面勝尾寺周辺の植生

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