プラナリゼーションCMPにおけるILD 用ならびにCu用スラリーに関する基礎的研究

With the growing miniaturization of wiring technology in ULSI devices, recently Cu / low-k wiring has been introduced, to which Damascine method, a derived from STI-CMP technology is applied . First,oxide films were polished with cerium oxide slurries of different crystallite sizes. Based on the results, for the comparison purpose, polishing was carried out using the slurries of mixed crystallite sizes. Second, sirica slurry that is known to produce excellent processing characteristics was used in this study to investigate the effects of the variables selected for this study, a statistical design was employed. Material removal rate as well as surface roughness ware examined in order to establish optimal particle size and concentration level of silica for Cu-CMP.textapplication/pdfdepartmental bulletin pape

Search for matter-dependent atmospheric neutrino oscillations in Super-Kamiokande

We consider ν_μ→ν_τ oscillations in the context of the mass varying neutrino (MaVaN) model, where the neutrino mass can vary depending on the electron density along the flight path of the neutrino. Our analysis assumes a mechanism with dependence only upon the electron density, hence ordinary matter density, of the medium through which the neutrino travels. Fully-contained, partially-contained and upward-going muon atmospheric neutrino data from the Super-Kamiokande detector, taken from the entire SK-I period of 1489 live days, are compared to MaVaN model predictions.We find that, for the case of 2-flavor oscillations, and for the specific models tested, oscillation independent of electron density is favored over density dependence. Assuming maximal mixing, the best-fit case and the densityindependent case do not differ significantly.journal articl

Study of Time-Dependent CP Violation in B0→J/ψπ0 Decays

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教育学部 情報科学基礎 1コマコース（平成19年度）

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柏崎周辺30km圏の植生 : 柏崎周辺の植生補遺

application/pdfapplication/pdfapplication/pdfapplication/pdfapplication/pdfBulletin of the Yokohama Phytosociological Society Vol.24boo