6 research outputs found
シンカク セイブツ ノ フクセイ カイシ リョウイキ ノ コウゾウ ト ヤクワリ
video/mp4講演者所属: 大阪大学大学院理学研究科生物科学専攻分子細胞生物学大講座教授vide
研究速報 : Non-linearity in Stress-Strain Relations of a wide Range of Geotechnical Engineering Materials : -Part1 Experimental results
departmental bulletin pape
Nanoindentation tests on diamond-machined silicon wafers
Nanoindentation tests were performed on ultraprecision diamond-turned silicon wafers and the results were compared with those of pristine silicon wafers. Remarkable differences were found between the two kinds of test results in terms of load-displacement characteristics and indent topologies. The machining-induced amorphous layer was found to have significantly higher microplasticity and lower hardness than pristine silicon. When machining silicon in the ductile mode, we are in essence always machining amorphous silicon left behind by the preceding tool pass; thus, it is the amorphous phase that dominates the machining performance. This work indicated the feasibility of detecting the presence and the mechanical properties of the machining-induced amorphous layers by nanoindentation.journal articl
