Double layer formation in the expanding region of an inductively coupled electronegative plasma

Double-layers (DLs) were observed in the expanding region of an inductively coupled plasma with $\text{Ar}/\text{SF}\_6$ gas mixtures. No DL was observed in pure argon or $\text{SF}\_6$ fractions below few percent. They exist over a wide range of power and pressure although they are only stable for a small window of electronegativity (typically between 8\% and 13\% of $\text{SF}\_6$ at 1mTorr), becoming unstable at higher electronegativity. They seem to be formed at the boundary between the source tube and the diffusion chamber and act as an internal boundary (the amplitude being roughly 1.5$\frac{kT\_e}{e}$)between a high electron density, high electron temperature, low electronegativity plasma upstream (in the source), and a low electron density, low electron temperature, high electronegativity plasma downstream

Experimental investigation of double layers in expanding plasmas

Double layers (DLs) have been observed in a plasma reactor composed of a source chamber attached to a larger expanding chamber. Positive ion beams generated across the DL were characterized in the low plasma potential region using retarding field energy analyzers. In electropositive gases, DLs were formed at very low pressures between 0.1 and 1 mTorr with the plasma expansion forced by a strongly diverging magnetic field. The DL remains static, robust to changes in boundary conditions, and its position is related to the magnetic field lines. The voltage drop across the DL increases with decreasing pressure, i.e., with increasing electron temperature around 20 V at 0.17 mTorr. DLs were also observed in electronegative gases without a magnetic field over a greater range of pressure 0.5 to 10 mTorr. The actual profile of the electronegative DL is very sensitive to external parameters and intrusive elements, and they propagate at high negative ion fraction. Electrostatic probes measurements and laser-induced photodetachment show discontinuities in all plasma parameters electron density, electron temperature, negative ion fraction at the DL position. The voltage drop across the electronegative DL is about 8 V, is independent of the gas pressure and therefore of the electron temperature

Collisionless heating in capacitive discharges enhanced by dual-frequency excitation

We discuss collisionless electron heating in capacitive discharges excited by a combination of two disparate frequencies. By developing an analytical model, we find, contrary to expectation, that the net heating in this case is much larger than the sum of the effects occurring when the two frequencies act separately. This prediction is substantiated by kinetic simulations, which are also in excellent general quantitative agreement with the model for discharge parameters that are typical of recent experiments

Periodic formation and propagation of double layers in the expanding chamber of an inductive discharge operating in Ar/SF₆ mixtures

It has previously been shown [Tuszewski et al., Plasma Sources Sci. Technol.12, 396 (2003)] that inductive discharges in electronegative gases are subject to two types of instability: the sourceinstability related to the E to H transition and a transport instability, occurring downstream when an expanding chamber is present. These two types of instability are observed in our “helicon” reactor operated without a static magnetic field in low-pressure Ar∕SF6 mixtures. Temporally and spatially resolved measurements show that, in our experiment, the downstream instability is a periodic formation and propagation of a double layer. The double layer is born at the end of the source tube and propagates slowly to the end of the expansion region with a velocity of 150ms⁻¹

CARTE: An Observation Station to Regulate Activity in a Learning Context

This chapter discusses the introduction of a new concept called "regulation" into a use model, which is part of a theoretical observation model called trace-based system (TBS). This concept defines a retroaction mechanism in an observation station. We present the results of experiments, in a learning context, with a prototype observation station called Collection, activity Analysis and Regulation based on Traces Enriched (CARTE)

Application to the SPIRAL project at GANIL of a new kind of large acceptance mass separator

International audienc

High intensity and space charge problems at GANIL

http://accelconf.web.cern.ch/AccelConf/c86/papers/g-04.pdfInternational audienceWe routinely accelerate up to micro-amperes of ionsat energies ranging from 25 to 95 MeV / A. Already atthese levels, space charge (S.C) problems drasticallyaffect the bunching efficiency between the ECRexternal ion-source and our Co compact injector.Moreover in the "2.5" version of GANIL we expectcurrents above 50 e\l A (Ar+6 for instance) and S.Ceffects will be of prime importance during accelerationin the injector and even in our first SSC. Wepresent our computer codes and our first results

Transition from unstable electrostatic confinement to stable magnetic confinement in a helicon reactor operating with Ar∕SF₆ gas mixtures

Two types of instabilities were previously identified in inductive discharges having an expanding chamber when negative ions are present: (i) the sourceinstability, occurring in the neighborhood of the capacitive-to-inductive (E to H) transition, and (ii) the downstream instability, which was shown to be the periodic formation and propagation of double layers. These unstable double layers were found over the entire parameter space (pressure/power) of interest, and they were born at the interface of the source and diffusion chambers. They acted as an internal electrostatic barrier separating a low-electronegativity, high-electron-density plasma upstream (in the source) and a high-electronegativity, low-electron-density plasma downstream. In this paper we have investigated the effect of adding a static axial magnetic field, classically used to increase the confinement and the plasma heating via helicon wave propagation. This had the following consequences: (i) the unstable double layers, and therefore the axial electrostatic confinement, were suppressed in a large part of the parameter space, and (ii) the magnetic confinement leads to a radially stratified plasma, the center being a low-electronegativity, high-density plasma and the edges being essentially an ion-ion plasma

Equilibrium model for two low-pressure electronegative plasmas connected by a double layer

Plihon et al. [J. Appl. Phys.98, 023306 (2005)] have recently shown that double layers usually form during the expansion of a low pressure electronegative plasma. These double layers act as permeable internal boundaries between the source (upstream) plasma and the downstream expanding plasma; positive ions flow from upstream to downstream whereas negative ions flow in the opposite direction. So far, the detailed physical mechanisms leading to their formation have not been identified. In this paper, we develop a model for the two plasma equilibria, upstream and downstream, assuming that the double layer exists and couples the two plasmas. At very low pressure, typically 0.5mTorr, the coupling is strong and acts both ways. The negative ions created downstream contributes to the upstream equilibrium as well as the upstream positive ions contribute to the downstream equilibrium. As the pressure increases, the situation becomes asymmetric. The sourceplasma is not affected by the negative ions flowing from downstream, whereas the positive ions coming from the source control the downstream plasma equilibrium, where local ionization is negligible.This work has been supported by the European Space Agency, under Ariadna Study Contract No. ACT-04-3101. One of the authors A.J.L. acknowledges the hospitality of the LPTP, where the collaboration was begun

Electron heating mechanisms in dual frequency capacitive discharges

We discuss electron heating mechanisms in the sheath regions of dual-frequency capacitive discharges, with the twin aims of identifying the dominant mechanisms and supplying closed-form expressions from which the heating power can be estimated. We show that the heating effect produced by either Ohmic or collisionless heating is much larger when the discharge is excited by a superposition of currents at two frequencies than if either current had acted alone. This coupling effect occurs because the lower frequency current, while not directly heating the electrons to any great extent, strongly affects the spatial structure of the discharge in the sheath regions