Recrystallized parylene as a mask for silicon chemical etching

This paper presents the first use of recrystallized parylene as masking material for silicon chemical etch. Recrystallized parylene was obtained by melting parylene C at 350°C for 2 hours. The masking ability of recrystallized parylene was tested in HNA (hydrofluoric acid, nitric acid and acetic acid) solution of various ratios, KOH (potassium hydroxide) solution and TMAH (tetramethylammonium hydroxide) at different temperatures and concentrations. It is found that interface between parylene and the substrate can be attacked, which results in undercuts. Otherwise, recrystallized parylene exhibited good adhesion to silicon, complete protection of unexposed silicon and silicon etching rates comparable to literature data

Q-enhanced fold-and-bond MEMS inductors

This work presents a novel coil fabrication technology to enhance quality factor (Q factor) of microfabricated inductors for implanted medical wireless sensing and data/power transfer applications. Using parylene as a flexible thin-film device substrate, a post-microfabrication substrate folding-and-bonding method is developed to effectively increase the metal thickness of the surface-micromachined inductors, resulting in their lower self-resistance so their higher quality factor. One-fold-and-bond coils are successfully demonstrated as an example to verify the feasibility of the fabrication technology with measurement results in good agreements with device simulation. Depending on target specifications, multiple substrate folding-and-bonding can be extensively implemented to facilitate further improved electrical characteristics of the coils from single fabrication batch. Such Q-enhanced inductors can be broadly utilized with great potentials in flexible integrated wireless devices/systems for intraocular prostheses and other biomedical implants

Novel Compact Multiband MIMO Antenna for Mobile Terminal

A novel compact MIMO antenna for personal digital assistant (PDA) and pad computer is proposed. The proposed antenna is composed by two multipatch monopole antennas which are placed 90° apart for orthogonal radiation. To strengthen the isolation, a T-shaped ground branch with proper dimension is used to generate an additional coupling path to lower the mutual coupling (below −15 dB), especially at GSM850/900 band. The proposed MIMO antenna is fabricated and tested, both the simulated and the measured results are presented, and some parametric studies are also demonstrated. In addition, there are some advantages about the proposed antenna such as simple structure, easy fabrication, and low cost

The numerical simulation on the regularity of dust dispersion in whole-rock mechanized excavation face with different air-draft amount

AbstractAn experimental investigation was carried out on coal dust-inertant mixture explosions. Tests of explosion severity and flammability limit were conducted by using the Siwek 20 L vessel and influences of ignition energy, coal dust calorific value, coal dust concentration and inertant composition were taken into account. The increase of inerting results with ignition energy is followed by an approximate stabilization when ignition energy exceeds 5kJ. The ignition energy region of 5-10kJ is appropriate for inerting testing, whereas ignitors with energy lower than 5kJ produce unrealistic inerting results. The inerting effectiveness of inertant increases with the reduction of coal dust calorific value. Coal dust concentrations near the stoichiometric concentration require the greatest amount of inertant to suppress explosions. As the coal dust concentration increases beyond the stoichiometric, the amount of inertant requirement is reduced. Due to the efficient decomposition and particular flame extinguishing mechanism, monoammonium phosphate represents more excellent inerting effectiveness than calcium carbonate

Signatures of magnetic reconnection at boundaries of interplanetary small-scale magnetic flux ropes

The interaction between interplanetary small-scale magnetic flux ropes and the magnetic field in the ambient solar wind is an important topic to understand- ing the evolution of magnetic structures in the heliosphere. Through a survey of 125 previously reported small flux ropes from 1995 to 2005, we find that 44 of them reveal clear signatures of Alfvenic fluctuations, and thus classify them into Alfven wave trains rather than flux ropes. Signatures of magnetic reconnection, generally including a plasma jet of ~30 km/s within a magnetic field rotational region, are clearly present at boundaries of about 42% of the flux ropes and 14% of the wave trains. The reconnection exhausts are often observed to show a local increase in the proton temperature, density and plasma beta. About 66% of the reconnection events at flux rope boundaries are associated with a magnetic field shear angle larger than 90 deg and 73% of them reveal a decrease by 20% or more in the magnetic field magnitude, suggesting a dominance of anti-parallel reconnec- tion at flux rope boundaries. The occurrence rate of magnetic reconnection at flux rope boundaries through the year of 1995 to 2005 is also investigated and we find that it is relatively low around solar maximum and much higher when ap- proaching solar minima. The average magnetic field depression and shear angle for reconnection events at flux rope boundaries also reveal a similar trend from 1995 to 2005. Our results demonstrate for the first time that boundaries of a substantial fraction of small-scale flux ropes have properties similar to those of magnetic clouds, in the sense that both of them exhibit signatures of magnetic reconnection. The observed reconnection signatures could be related either to the formation of small flux ropes, or to the interaction between flux ropes and the interplanetary magnetic fields.Comment: 10 figures, accepted by Ap