Modeling the conformality of atomic layer deposition: the effect of sticking probability

The key advantage of atomic layer deposition (ALD) is undoubtedly the excellent step coverage, which allows for conformal deposition of thin films in high-aspect-ratio structures. In this paper, a model is proposed to predict the deposited film thickness as a function of depth inside a hole. The main model parameters are the gas pressure, the deposition temperature, and the initial sticking probability of the precursor molecules. Earlier work by Gordon et al. assumed a sticking probability of 0/100% for molecules hitting a covered/uncovered section of the wall of the hole, thus resulting in a stepwise film-thickness profile. In this work, the sticking probability is related to the surface coverage theta by Langmuir’s equation s(theta) = s0(1−theta), whereby the initial sticking probability s0 is now an adjustable model parameter. For s0~=100%, the model predicts a steplike profile, in agreement with Gordon et al., while for smaller values of s0, a gradual decreasing coverage profile is predicted. Furthermore, experiments were performed to quantify the conformality for the trimethylaluminum (TMA)/H2O ALD process using macroscopic test structures. It is shown that the experimental data and the simulation results follow the same trends

Thin film solid-state reactions forming carbides as contact materials for carbon-containing semiconductors

A

The texture of thin NiSi films and its effect on agglomeration

Nickel silicide films are used as contacting materials in the micro electronics industry. It was recently [1] discovered that these films exhibit a peculiar type of texture, which was called 'axiotaxy', whereby certain lattice planes in the NiSi grains are preferentially aligned to (110)-type lattice planes in the single crystal Si substrate. In this contribution, we present a quantitative study of this phenomenon, using both XRD pole figure measurements and EBSD. Furthermore, we report a correlation between the texture of these NiSi films and their morphological stability during annealing at high temperature. In spite of the small grain size in these films, EBSD could be used to determine the volume fractions of the various texture components. This provided quantitative support for the claim that axiotaxy is the main texture component in these films, as about 40% of the grains belong to one of the axiotaxial texture components, and the remaining fraction exhibits a random orientation. A discussion of the techniques used during the measurement and analysis of the EBSD data is presented, as this must be given special consideration in view of the peculiar type of texture encountered in these films. Secondly, both XRD and EBSD were performed after annealing the NiSi films at various temperatures and durations. It is known that thin NiSi films have a strong tendency to agglomerate [2]. Our data indicates a correlation between the texture evolution and the agglomeration of the NiSi layer. Grains with axiotaxial orientation were observed to grow and thicken during the annealing process, by consuming neighboring randomly oriented grains. This suggests that the texture of the NiSi layer is a determining factor for the morphological stability of the film. The fact that grains with axiotaxial orientation grow during heat treatment can be related to the one dimensional periodicity at the interface, which lowers the interface energy and thus provides a driving force for the preferred growth of these grains. The agglomeration of NiSi films results in a significant increase of the sheet resistance. Therefore, these results illustrate the importance of texture control for the application of these films as contacts in micro-electronic devices

Petri Net Reachability Graphs: Decidability Status of FO Properties

We investigate the decidability and complexity status of model-checking problems on unlabelled reachability graphs of Petri nets by considering first-order, modal and pattern-based languages without labels on transitions or atomic propositions on markings. We consider several parameters to separate decidable problems from undecidable ones. Not only are we able to provide precise borders and a systematic analysis, but we also demonstrate the robustness of our proof techniques

Measuring galaxy [OII] emission line doublet with future ground-based wide-field spectroscopic surveys

The next generation of wide-field spectroscopic redshift surveys will map the large-scale galaxy distribution in the redshift range 0.7< z<2 to measure baryonic acoustic oscillations (BAO). The primary optical signature used in this redshift range comes from the [OII] emission line doublet, which provides a unique redshift identification that can minimize confusion with other single emission lines. To derive the required spectrograph resolution for these redshift surveys, we simulate observations of the [OII] (3727,3729) doublet for various instrument resolutions, and line velocities. We foresee two strategies about the choice of the resolution for future spectrographs for BAO surveys. For bright [OII] emitter surveys ([OII] flux ~30.10^{-17} erg /cm2/s like SDSS-IV/eBOSS), a resolution of R~3300 allows the separation of 90 percent of the doublets. The impact of the sky lines on the completeness in redshift is less than 6 percent. For faint [OII] emitter surveys ([OII] flux ~10.10^{-17} erg /cm2/s like DESi), the detection improves continuously with resolution, so we recommend the highest possible resolution, the limit being given by the number of pixels (4k by 4k) on the detector and the number of spectroscopic channels (2 or 3).Comment: 5 pages, 1 figur

Multidimensional Poverty in Seychelles

The typically used multidimensional poverty indicators in the literature do not appear to be relevant for middle-income countries like Seychelles and can yield unrealistic estimates of poverty. In particular, the deprivations typically considered in such measures little occurs in middle-income economies. In this paper, we propose a new approach to measuring multidimensional poverty in Seychelles based on a mix of objective and subjective information about households living conditions, and on how these households view their spending priorities. The empirical results based on our new approach show that a small but non-negligible minority of Seychellois can be considered as multidimensionally poor, mostly as not being able to satisfy their shelter and food basic needs. Finally, the Seychelles social aid programs run by the Agency for Social Protection is poorly targeted whether evaluated in terms of multidimensional poverty or in terms of one-dimensional monetary poverty

Phase formation and thermal stability of ultrathin nickel-silicides on Si(100)

The solid-state reaction and agglomeration of thin nickel-silicide films was investigated from sputter deposited nickel films (1-10 nm) on silicon-on-insulator (100) substrates. For typical anneals at a ramp rate of 3 degrees C/s, 5-10 nm Ni films react with silicon and form NiSi, which agglomerates at 550-650 degrees C, whereas films with a thickness of 3.7 nm of less were found to form an epitaxylike nickel-silicide layer. The resulting films show an increased thermal stability with a low electrical resistivity up to 800 degrees C

Generalizing the advancing front method to composite surfaces in the context of meshing constraints topology

International audienceBeing able to automatically mesh composite geometry is an important issue in the context of CAD-FEA integration. In some specific contexts of this integration, such as using virtual topology or meshing constraints topology (MCT), it is even a key requirement. In this paper, we present a new approach to automatic mesh generation over composite geometry. The proposed mesh generation approach is based on a generalization of the advancing front method (AFM) over curved surfaces. The adaptation of the AFM to composite faces (composed of multiple boundary representation (B-Rep) faces) involves the computation of complex paths along these B-Rep faces, on which progression of the advancing front is based. Each mesh segment or mesh triangle generated through this progression on composite geometry is likely to lie on multiple B-Rep faces and consequently, it is likely to be associated with a composite definition across multiple parametric spaces. Collision tests between new front segments and existing mesh elements also require specific and significant adaptations of the AFM, since a given front segment is also likely to lie on multiple B-Rep faces. This new mesh generation approach is presented in the context of MCT, which requires being able to handle composite geometry along with non-manifold boundary configurations, such as edges and vertices lying in the interior domain of B-Rep faces