Design and fabrication of a micromachined electrostatically suspended gyroscope

The current paper describes the design and fabrication of a micromachined electrostatically suspended gyroscope. Electrostatic levitation is employed to suspend the rotor, eliminating the mechanical bearing and thus friction effects between the rotor and the substrate, hence improving long-term stability. The rate of rotation can be measured by detecting the torque-induced displacement of the spinning rotor using capacitive interface circuits. The device structure and its basic operating principle are described, as well as theoretical background and design considerations. The fabrication process of the gyroscope relies on glass/silicon/glass stack bonding and deep dry etching and is outlined in detail. Initial prototypes realized with this fabrication process are presented and described

A micromachined electrostatically suspended gyroscope with digital for feedback

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MEMS velocity sensor using direct velocity feedback

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