The 100 mm × 100 mm Extreme Ultraviolet Graphite Pellicle: Nano-Pellicle Production Using the Lowest Free Energy at the Graphite–Water Interface

Extreme ultraviolet (EUV) lithography is developed and implemented to fabricate nanodevices under 7 nm. Among the various challenges of EUV lithography, it is certainly a priority for a pellicle, as a physical shield, to protect a reflective EUV mask. Here, a practical, facile, industrial-friendly pellicle fabrication method is suggested to suspend a nanometer-thick graphite film (NGF) onto a pellicle frame (inner hole: 100 mm × 100 mm) by the vertical transfer (VT) method, benefitting from the lowest total free energy at the interfaces between NGF, water, and air. Based on the plate model of Neumann and Good, the free energy at the interfaces at various scooping angles is obtained; it is minimized at 90° (VT). Finally, for the very first time an NGF pellicle (100 mm × 100 mm) and 80.6% transmission at 13.5 nm (EUV) using the VT method are demonstrated

Continuous bundles of aligned electrospun PAN nano-fiber using electrostatic spiral collector and converging coil

We develop an advanced electrospinning process that uses an electrostatic spiral collecting coil and a converging coil to produce a polyacrylonitrile (PAN) polymer fiber with a nanometer-sized diameter. The electrostatic spiral collecting coil was used as a collector on which to deposit a continuous and aligned PAN polymer fiber, and the converging coil was used to adjust the collecting area of the fibers. The fiber bundles were continuously withdrawn from the spiral collector, and to estimate the behavior of the fibers, equipotential lines were calculated for the electrospinning system by using a 3D simulation program. A high-speed camera and a magnifying camera were used to observe the actual behavior of the fibers. In this study, the interval distance of the spiral collecting coil was adjusted to obtain bundles of with various diameters for use in various applications. The average diameter of the fibers is of about 250 nm, and the range of the average diameter of the bundles is between 30 μm and 120 μm. Among the fiber bundles, around 90 μm of the bundle was best well-aligned and its fracture force and strain strength were of around 80 mN and 12.6 MPa before the stabilization process

Influence of high-performance work system on employee service performance and OCB: the mediating role of resilience

Abstract Previous studies regarding high-performance work system (HPWS)-performance relationship have been conducted at organizational level of analysis, thus highlighted management perspective of this relationship. Furthermore, the widely acknowledged ‘black-box’ debate in this area invites researchers to identify and empirically test the mediating mechanism linking HPWS with performance outcomes. Using employee-level HPWS, this study proposed that HPWS is positively linked with employee service performance and their organizational citizenship behavior (OCB) and these direct relationships are mediated by employee resilience. Data were obtained from 371 front line employees working in service sector to test the proposed relationships. Findings of the study revealed that HPWS was positively linked with service performance and OCB. Further, employee resilience partially mediated both the direct relationships between HPWS and employee outcomes. Implications and limitations of the study were also discussed accordingly