Revisiting the anomalous rf field penetration into a warm plasma

Radio frequency waves do not penetrate into a plasma and are damped within it. The electric field of the wave and plasma current are concentrated near the plasma boundary in a skin layer. Electrons can transport the plasma current away from the skin layer due to their thermal motion. As a result, the width of the skin layer increases when electron temperature effects are taken into account. This phenomenon is called anomalous skin effect. The anomalous penetration of the rf electric field occurs not only for transversely propagating to the plasma boundary wave (inductively coupled plasmas) but also for the wave propagating along the plasma boundary (capacitively coupled plasmas). Such anomalous penetration of the rf field modifies the structure of the capacitive sheath. Recent advances in the nonlinear, nonlocal theory of the capacitive sheath are reported. It is shown that separating the electric field profile into exponential and non-exponential parts yields an efficient qualitative and quantitative description of the anomalous skin effect in both inductively and capacitively coupled plasma.Comment: 44 pages, invited paper at "Nonlocal, Collisionless Phenomena in Plasma" worksho

Anomalous Capacitive Sheath with Deep Radio Frequency Electric Field Penetration

A novel nonlinear effect of anomalously deep penetration of an external radio frequency electric field into a plasma is discribed. A self-consistent kinetic treatment reveals a transition region between the sheath and the plasma. Because of the electron velocity modulation in the sheath, bunches in the energetic electron density are formed in the transition region adjusted to the sheath. The width of the region is of order $V_{T}/\omega$, where V_{T} is the electron thermal velocity, and $\omega$ is frequency of the electric field. The presence of the electric field in the transition region results in a cooling of the energetic electrons and an additional heating of the cold electrons in comparison with the case when the transition region is neglected.Comment: 14,4 figure