31 research outputs found
Comments on "Determining specific contact resistivity from contact end resistance measurements"
No full text
Junction-isolated electrical test structures for critical dimension calibration standards
No full textA modified sliding wire potentiometer test structure for mapping nanometer-level distances
No full textVoltage-dividing potentiometer enhancements for high-precision feature placement metrology
No full textSheet and line resistance of patterned SOI surface film CD reference materials as a function of substrate bias
No full text
Test structures for determining design rules for microelectromechanical-based sensors and actuators
No full text
Temperature dependence of the modulation of electrical linewidth of single-crystal critical dimension artifacts
No full text
