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1 research outputs found
CD error sensitivity to "sub-killer" defects at k1 near 0.4
Author
Douglas J. Van Den Broeke
+8 more
J. Fung Chen
Kent H. Nakagawa
Kurt E. Wampler
Mircea V. Dusa
Nathan A. Diachun
Robert J. Socha
Roger F. Caldwell
Thomas L. Laidig
Publication venue
SPIE-Intl Soc Optical Eng
Publication date
14/06/1999
Field of study
No full text
Crossref
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