3 research outputs found
Double solid phase epitaxy of germanium implanted silicon on sapphire
- Author
- Publication venue
- Institute of Electrical and Electronics Engineers (IEEE)
- Publication date
- Field of study
No full textThe donor concentration in silicon implanted silicon and silicon on sapphire
- Author
- Publication venue
- Institute of Electrical and Electronics Engineers (IEEE)
- Publication date
- Field of study
No full textIon Implantation
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- Y Akasaka
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- YZ Akilov
- Z Szmid
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- Publication venue
- 'Springer Science and Business Media LLC'
- Publication date
- 01/01/1976
- Field of study
No full text
