Comparison of processing-induced deformations of InP bonded to Si determined by e-beam metrology: direct vs. adhesive bonding

In this paper, we employ an electron beam writer as metrology tool to investigate distortion of an exposed pattern of alignment marks in heterogeneously bonded InP on silicon. After experimental study of three different bonding and processing configurations which represent typical on-chip photonic device fabrication conditions, the smallest degree of linearly-corrected distortion errors is obtained for the directly bonded wafer, with the alignment marks both formed and measured on the same InP layer side after bonding (equivalent to single-sided processing of the bonded layer). Under these conditions, multilayer exposure alignment accuracy is limited by the InP layer deformation after the initial pattern exposure mainly due to the mechanical wafer clamping in the e-beam cassette. Bonding-induced InP layer deformations dominate in cases of direct and BCB bonding when the alignment marks are formed on one InP wafer side, and measured after bonding and substrate removal from another (equivalent to double-sided processing of the bonded layer). The findings of this paper provide valuable insight into the origin of the multilayer exposure misalignment errors for the bonded III-V on Si wafers, and identify important measures that need to be taken to optimize the fabrication procedures for demonstration of efficient and high-performance on-chip photonic integrated devices.Comment: 7 pages, 6 figure

Fine-tunable near-critical Stranski-Krastanov growth of InAs/InP quantum dots

Emerging applications of self-assembled semiconductor quantum dot (QD)-based nonclassical light sources emitting in the telecom C-band (1530 to 1565 nm) present challenges in terms of controlled synthesis of their low-density ensembles, critical for device processing with an isolated QD. This work shows how to control the surface density and size of InAs/InP quantum dots over a wide range by tailoring the conditions of Stranski-Krastanow growth. We demonstrate that in the near-critical growth regime, the density of quantum dots can be tuned between $10^7$ and $10^{10} cm^{-2}$. Furthermore, employing both experimental and modeling approaches, we show that the size (and therefore the emission wavelength) of InAs nanoislands on InP can be controlled independently from their surface density. Finally, we demonstrate that our growth method gives low-density ensembles resulting in well-isolated QD-originated emission lines in the telecom C-band

Experimental Demonstration of Nanolaser with sub-μ\muA Threshold Current

We demonstrate a photonic crystal nanolaser exhibiting an ultra-low threshold of 730 nA at telecom wavelengths. The laser can be directly modulated at 3 GHz at an energy cost of 1 fJ/bit. This is the lowest threshold reported for any laser operating at room temperature and facilitates low-energy on-chip links.Comment: 3 pages with 2 figure

Scalable quantum photonic devices emitting indistinguishable photons in the telecom C-band

Epitaxial semiconductor quantum dots (QDs) are a promising resource for quantum light generation and the realization of non-linear quantum photonic elements operating at the single-photon level. Their random spatial distribution resulting from their self-organized nature, however, restrains the fabrication yield of quantum devices with the desired functionality. As a solution, the QDs can be imaged and localized, enabling deterministic device fabrication. Due to the significant electronic noise of camera sensors operating in the telecommunication C-band, $1530-1560~\mathrm{nm}$, this technique remained challenging. In this work, we report on the imaging of QDs epitaxially grown on InP with emission wavelengths in the telecom C-band demonstrating a localization accuracy of $80~\mathrm{nm}$. This is enabled by the hybrid integration of QDs in a planar sample geometry with a bottom metallic reflector to enhance the out-of-plane emission. To exemplify our approach, we successfully fabricate circular Bragg grating cavities around single pre-selected QDs with an overall cavity placement uncertainty of $90~\mathrm{nm}$. QD-cavity coupling is demonstrated by a Purcell enhancement up to $\sim5$ with an estimated photon extraction efficiency of $(16.6\pm2.7)\%$ into a numerical aperture of $0.4$. We demonstrate triggered single-photon emission with $g^{(2)}(0)=(3.2\pm0.6)\times10^{-3}$ and record-high photon indistinguishability associated with two-photon interference visibilities of $V = (19.3\pm2.6)\%$ and $V_{\mathrm{PS}} = 99.8^{+0.2}_{-2.6}\%$ without and with temporal postselection, respectively. While the performance of our devices readily enables proof-of-principle experiments in quantum information, further improvements in the yield and coherence may enable the realization of non-linear devices at the single photon level and advanced quantum networks at the telecom wavelength.Comment: 9 pages, 4 figures, Supplemental Material: 20 pages, 18 figure