Optical spectroscopy of rare-earth ions doped KY(WO4)2 thin films

KY(WO4)2 thin films doped with Dy3+, Tb3+, Yb3+, were grown onto KY(WO4)2 substrates using liquid-phase epitaxy. Spectroscopic investigations of the grown layers were performed. Obtained results were compared with spectra given for bulk crystals. Upconversion experiments after direct Yb3+ excitation in Dy3+-Yb3+ and Tb3+-Yb3+ codoped layers will be also presented

Nano-Hall sensors with granular Co-C

We analyzed the performance of Hall sensors with different Co-C ratios, deposited directly in nano-structured form, using $Co_2(CO)_8$ gas molecules, by focused electron or ion beam induced deposition. Due to the enhanced inter-grain scattering in these granular wires, the Extraordinary Hall Effect can be increased by two orders of magnitude with respect to pure Co, up to a current sensitivity of $1 \Omega/T$. We show that the best magnetic field resolution at room temperature is obtained for Co ratios between 60% and 70% and is better than $1 \mu T/Hz^{1/2}$. For an active area of the sensor of $200 \times 200 nm^2$, the room temperature magnetic flux resolution is $\phi_{min} = 2\times10^{-5}\phi_0$, in the thermal noise frequency range, i.e. above 100 kHz.Comment: 5 pages, 4 figure

Continuum models of focused electron beam induced processing

© 2015 Toth et al. Focused electron beam induced processing (FEBIP) is a suite of direct-write, high resolution techniques that enable fabrication and editing of nanostructured materials inside scanning electron microscopes and other focused electron beam (FEB) systems. Here we detail continuum techniques that are used to model FEBIP, and release software that can be used to simulate a wide range of processes reported in the FEBIP literature. These include: (i) etching and deposition performed using precursors that interact with a surface through physisorption and activated chemisorption, (ii) gas mixtures used to perform simultaneous focused electron beam induced etching and deposition (FEBIE and FEBID), and (iii) etch processes that proceed through multiple reaction pathways and generate a number of reaction products at the substrate surface. We also review and release software for Monte Carlo modeling of the precursor gas flux which is needed as an input parameter for continuum FEBIP models

Annular aperture arrays: study in the visible region of the electromagnetic spectrum

http://www.opticsinfobase.org/abstract.cfm?URI=ol-30-13-1611Baida and Van Labeke recently proposed a structure that exhibits a supertransmission of light through an array of nanometric coaxial apertures in a metallic film that has been named an annular aperture array (AAA) [Opt. Commun.209, 17 (2002); Phys. Rev. B67, 155314 (2003); J. Microsc.213, 140 (2003)]. We present the first experimental study, to our knowledge, of an AAA structure in the visible region. For technological reasons, the structure under study does not produce a supertransmission of 80% as in Baida and Van Labeke [Opt. Commun.209, 17 (2002)]. We built the nanostructure and experimentally recorded its far-field spectral response. This transmission shows only one broad band with a maximum around lambda=700 nm, giving a maximum efficiency around 17%. A finite-difference time-domain simulation reproduces quite well the obtained transmission spectrum

Towards a single step process to create high purity gold structures by electron beam induced deposition at room temperature

Highly pure metallic structures can be deposited by electron beam induced deposition and they have many important applications in different fields. The organo-metallic precursor is decomposed and deposited under the electron beam, and typically it is purified with post-irradiation in presence of O2. However, this approach limits the purification to the surface of the deposit. Therefore, 'in situ' purification during deposition using simultaneous flows of both O2 and precursor in parallel with two gas injector needles has been tested and verified. To simplify the practical arrangements, a special concentric nozzle has been designed allowing deposition and purification performed together in a single step. With this new device metallic structures with high purity can be obtained more easily, while there is no limit on the height of the structures within a practical time frame. In this work, we summarize the first results obtained for 'in situ' Au purification using this concentric nozzle, which is described in more detail, including flow simulations. The operational parameter space is explored in order to optimize the shape as well as the purity of the deposits, which are evaluated through scanning electron microscope and energy dispersive x-ray spectroscopy measurements, respectively. The observed variations are interpreted in relation to other variables, such as the deposition yield. The resistivity of purified lines is also measured, and the influence of additional post treatments as a last purification step is studied.EMPA is acknowledged for providing the original code for the GIS simulator model, which was extended by Stan de Muijnck (TU Delft) with the new geometry. Pleun Dona (FEI) is acknowledged for helping in the design of the concentric nozzle and in getting a working prototype. Patricia Peinado is also acknowledged for help on experimental activities. This work was supported by NanoNextNL program, a Dutch national research and technology program for micro- and nano-technology

Electron Beam-Induced Writing of Nanoscale Iron Wires on a Functional Metal Oxide

Electron beam-induced surface activation (EBISA) has been used to grow wires of iron on rutile TiO2(110)-(1 × 1) in ultrahigh vacuum. The wires have a width down to ∼20 nm and hence have potential utility as interconnects on this dielectric substrate. Wire formation was achieved using an electron beam from a scanning electron microscope to activate the surface, which was subsequently exposed to Fe(CO)5. On the basis of scanning tunneling microscopy and Auger electron spectroscopy measurements, the activation mechanism involves electron beam-induced surface reduction and restructuring

Coordination and organometallic precursors of group 10 and 11 Focused electron beam induced deposition of metals and insight gained from chemical vapour deposition, atomic layer deposition, and fundamental surface and gas phase studies

Nanostructured materials made from group 10 Ni, Pd, Pt and group 11 Cu, Ag, Au elements have outstanding technological relevance in microelectronics, nano optics, catalysis, and energy conversion. Processes that allow for the easy and reliable fabrication of such nanostructures are heavily sought after. Focused electron beam induced deposition FEBID is the only direct write technique that can fabricate nanostructures with arbitrary shape and dimensions down to the sub 10 nm regime. However, the complex chemistry of FEBID involving electron induced dissociation processes of metalorganic precursors molecules, surface kinetics, and thermal effects is poorly understood and far from being optimized. Here, we review in a comparative manner the performance and the underlying chemical reactions of surface deposition processes, namely, chemical vapour deposition CVD , atomic layer deposition ALD , and FEBID itself. The knowledge gained in CVD and ALD as related surface deposition techniques will help us to understand the spatially selective chemistry occurring in FEBID. Fundamental surface and gas phase studies provide insight to electron induced chemistry and desorption of precursor fragments. Specific emphasis is put on the type of the ligands and their different behaviour under thermal, surface related, and electron induced processes. The comprehensive overview of the current state of FEBID for group 10 and 11 metals includes reactive environments and purification approaches as these may provide valuable information on the design of novel precursors. The evaluation of the precursor and process performance is extended to include W, Co, Fe, Ru, Rh, and Ir to represent a general guide towards future developments in FEBID. These may not only rely on the design of novel compounds but also on optimized deposition strategies inspired by ALD and CV